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Sensors and Actuators A: Physical 2020 / 12

Porous silicon membranes and their applications: recent advances

Vercauteren, Roselien, Scheen, Gilles, Raskin, Jean-Pierre, Francis, Laurent A.
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112486
Date:
December, 2020
File:
PDF, 115 KB
2020
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