Oxygen source-Oriented Control of APCVD VO2 for Capacitive...

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Journal of Electrochemical Science and Engineering 2016 / 05

Oxygen source-Oriented Control of APCVD VO2 for Capacitive Applications

Vernardou, Dimitra, Bei, Antonia, Louloudakis, Dimitris, Katsarakis, Nikolaos, Koudoumas, Emmanouil
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Journal:
Journal of Electrochemical Science and Engineering
DOI:
10.5599/jese.278
Date:
May, 2016
File:
PDF, 1023 KB
2016
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