A flange-type standard leak element and its vacuum...

Vacuum 2021 / 02 Vol. 184

A flange-type standard leak element and its vacuum applications

Chan, C.K., Yeh, S.D., Chang, C.C., Tu, C.Y., Yang, I.C., Chang, K.L., Luo, C.W., Hwang, C.S.
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Volume:
184
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109945
Date:
February, 2021
File:
PDF, 2.42 MB
2021
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