Thermal history of sheet resistivity in arsenic implanted silicon
Takashi Tsuchimoto, Katsuhiko Itoh, Fuminori KumagayaVolume:
19
Year:
1976
Language:
english
Pages:
2
DOI:
10.1016/0038-1101(76)90049-6
File:
PDF, 272 KB
english, 1976