Electrical and thermal stability of AuGeNi ohmic contacts...

Solid-State Electronics 1986 Vol. 29; Iss. 5

Electrical and thermal stability of AuGeNi ohmic contacts to GaAs fabricated with in situ RF sputter cleaning

A. Callegari, D. Lacey, E.T.-S. Pan
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Volume:
29
Year:
1986
Language:
english
Pages:
5
DOI:
10.1016/0038-1101(86)90073-0
File:
PDF, 448 KB
english, 1986
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