X-ray analysis of sputtered films of beta-tantalum and...

Thin Solid Films 1972 Vol. 10; Iss. 1

X-ray analysis of sputtered films of beta-tantalum and body-centered cubic tantalum

Mildred H. Read, D.H. Hensler
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Volume:
10
Year:
1972
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(72)90277-5
File:
PDF, 808 KB
english, 1972
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