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Production of thin tungsten films
N.I. Balalikin, J. Buch, V.V. Katrasev, A.V. SkrypnikVolume:
38
Year:
1976
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(76)90004-3
File:
PDF, 356 KB
english, 1976