![](/img/cover-not-exists.png)
MeV He backscattering analysis of ion-implanted Si: Drive-in diffusion and epitaxial regrowth
J.W. Mayer, L. Csepregi, J. Gyulai, T. Nagy, G. Mezey, P. Revesz, E. KotaiVolume:
32
Year:
1976
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(76)90318-7
File:
PDF, 209 KB
english, 1976