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Effects of temperature on the solid phase epitaxy of silicon
Z.L. Liau, S.S. Lau, M.-A. Nicolet, J.W. MayerVolume:
46
Year:
1977
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(77)90344-3
File:
PDF, 644 KB
english, 1977