Depth resolution in sputter profiling: Evidence against the...

Depth resolution in sputter profiling: Evidence against the sequential layer sputtering model

K. Wittmaack, F. Schulz
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Volume:
52
Year:
1978
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(78)90144-x
File:
PDF, 607 KB
english, 1978
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