![](/img/cover-not-exists.png)
Electrical and structural properties of tantalum nitride thin films deposited by sputtering
R. Petrović, T. Nenadović, N. Kraljević, T. DimitrijevićVolume:
57
Year:
1979
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(79)90174-3
File:
PDF, 437 KB
english, 1979