The growth kinetics and properties of hard and insulating carbonaceous films grown in an r.f. discharge
S.M. Ojha, H. Norström, D. McCulluchVolume:
60
Year:
1979
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(79)90191-3
File:
PDF, 547 KB
english, 1979