Depth profiling of oxygen in amorphous germanium films by...

Thin Solid Films 1980 Vol. 65; Iss. 2

Depth profiling of oxygen in amorphous germanium films by secondary ion mass spectrometry

N.G. Nakhodkin, A.F. Bardamid, A.I. Shaldervan, S.P. Chenakin
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Volume:
65
Year:
1980
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(80)90255-2
File:
PDF, 1023 KB
english, 1980
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