Elastic stiffness and thermal expansion coefficients of various refractory silicides and silicon nitride films
T.F. Retajczyk Jr., A.K. SinhaVolume:
70
Year:
1980
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(80)90364-8
File:
PDF, 369 KB
english, 1980