Plasma etching of SnO2 films on silicon substrates

Thin Solid Films 1980 Vol. 73; Iss. 2

Plasma etching of SnO2 films on silicon substrates

E.S Braga, A.P Mammana, C.I.Z Mammana, Richard L Anderson
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Volume:
73
Year:
1980
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(80)90483-6
File:
PDF, 173 KB
english, 1980
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