Investigations on the quality of polysilicon film-gate dielectric interface in polysilicon thin film transistors
Ji-Ho Kung, Miltiadis K. Hatalis, Jerzy KanickiVolume:
216
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90883-d
File:
PDF, 853 KB
english, 1992