![](/img/cover-not-exists.png)
Photo-induced chemical vapour deposition of silicon oxide thin films
P González, D Fernández, J Pou, E García, J Serra, B León, M Pérez-AmorVolume:
218
Year:
1992
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(92)90916-y
File:
PDF, 966 KB
english, 1992