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Synthesis of thin films of semiconductor and refractory metal nitrides by laser irradiation of solid samples in ambient gases
E D'Anna, G Leggieri, A LuchesVolume:
218
Year:
1992
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(92)90922-x
File:
PDF, 1.32 MB
english, 1992