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Photodeposition sputtering of titanium and TiN thin films
T.M Nenadović, T.P Mihać, Z.Lj RakočevićVolume:
218
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(92)90924-z
File:
PDF, 796 KB
english, 1992