Direct formation of polyimide thin films by vapor...

Thin Solid Films 1993 Vol. 232; Iss. 2

Direct formation of polyimide thin films by vapor deposition polymerization

Atsushi Kubono, Hirotaka Higuchi, Susumu Umemoto, Norimasa Okui
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Volume:
232
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90018-k
File:
PDF, 491 KB
english, 1993
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