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Spectroscopic ellipsometry of strained Si1-x Gex layers
M. Líbezný, J. Poortmans, M. Caymax, A. Van Ammel, J. Kuběna, V. Holý, J. VanhellemontVolume:
233
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90080-9
File:
PDF, 351 KB
english, 1993