![](/img/cover-not-exists.png)
Investigation of thin AIN films for piezolayer-field effect transistor applications
B. Matthes, E. Broszeit, O. Zucker, P. GauerVolume:
226
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90226-f
File:
PDF, 900 KB
english, 1993