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Surface roughness of Mo films prepared by magnetron sputtering
T. Hino, Y. Makabe, Y. Hirohata, T. YamashinaVolume:
229
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(93)90365-v
File:
PDF, 797 KB
english, 1993