Structural and electrical properties of Ni films grown on...

Structural and electrical properties of Ni films grown on Si(100) and SiO2 by d.c. bias sputtering

Hong Qiu, Gyorgy Sáfrán, Bela Pecz, Peter B. Barna, Akio Kosuge, Hisashi Nakai, Shigemi Yugo, Mituru Hashimoto
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Volume:
229
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(93)90416-m
File:
PDF, 1.52 MB
english, 1993
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