The effect of substrate temperature on the properties of d.c. reactive magnetron sputtered titanium oxide films
Li-jian Meng, M. Andritschky, M.P. dos SantosVolume:
223
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(93)90528-w
File:
PDF, 740 KB
english, 1993