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Selective area deposition of diamond on 4 in Si wafers
W. Hänni, C. Müller, M. Binggeli, H.E. Hintermann, P. Krebs, A. GriselVolume:
236
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90648-9
File:
PDF, 387 KB
english, 1993