Structural and electrical properties of 28Si+ and 40Ar+ ion implanted epitaxial ReSi2 films grown on n-Si(100) substrates
Kun Ho Kim, Sung Chul Kim, Jeong Yong Lee, Sang Tack Nam, Jeoung Ju Lee, Chi Kyu Choi, Marc-A. Nicolet, Gang BaiVolume:
232
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90758-h
File:
PDF, 911 KB
english, 1993