Homogeneous chemical etching of sand-blasted silicon...

Thin Solid Films 1995 Vol. 255; Iss. 1-2

Homogeneous chemical etching of sand-blasted silicon substrates

M. Vergnat, N.Hadj Zoubir, A. Burneau
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Volume:
255
Year:
1995
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(94)05660-6
File:
PDF, 271 KB
english, 1995
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