Optical and mechanical properties of carbon nitride films...

Thin Solid Films 1995 Vol. 256; Iss. 1-2

Optical and mechanical properties of carbon nitride films prepared by ion-assisted arc deposition and magnetron sputtering

X. Wang, P.J. Martin, T.J. Kinder
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Volume:
256
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(94)06313-3
File:
PDF, 1.04 MB
english, 1995
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