A comparison of three techniques for measuring strain at feature of thin film materials
R.C. Goforth, B. Chandran, R.K. Ulrich, S. NasrazadaniVolume:
250
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)90179-1
File:
PDF, 816 KB
english, 1994