Structural properties of titanium dioxide films grown on...

Thin Solid Films 1994 Vol. 238; Iss. 1

Structural properties of titanium dioxide films grown on p-Si by metal-organic chemical vapor deposition at low temperature

Y.S. Yoon, W.N. Kang, S.S. Yom, T.W. Kim, M. Jung, T.H. Park, K.Y. Seo, Jong Yong Lee
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Volume:
238
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(94)90640-8
File:
PDF, 492 KB
english, 1994
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