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Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates
E Roca, J Vanhellemont, R.J Schreutelkamp, J VermeirenVolume:
240
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(94)90705-6
File:
PDF, 419 KB
english, 1994