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A theoretical study of the effect of thermal annealing on curvature changes in multilayered structures
Sara E. Rosenberg, Peter Y. Wong, Ioannis N. MiaoulisVolume:
269
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06684-5
File:
PDF, 612 KB
english, 1995