Electron microscopy characterization of TiN films on Si,...

Thin Solid Films 1995 Vol. 268; Iss. 1-2

Electron microscopy characterization of TiN films on Si, grown by d.c. reactive magnetron sputtering

B. Pécz, N. Frangis, S. Logothetidis, I. Alexandrou, P.B. Barna, J. Stoemenos
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Volume:
268
Year:
1995
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(95)06692-6
File:
PDF, 986 KB
english, 1995
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