Novel plasma polymerization system using a d.c. glow...

Thin Solid Films 1996 Vol. 273; Iss. 1-2

Novel plasma polymerization system using a d.c. glow discharge

Toshihiro Suwa, Mitsutoshi Jikei, Masa-aki Kakimoto, Yoshio Imai, Akira Tanaka, Katsumi Yoneda
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Volume:
273
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)07000-1
File:
PDF, 474 KB
english, 1996
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