Effect of N2O/SiH4 ratio on the properties of...

Effect of N2O/SiH4 ratio on the properties of low-temperature silicon oxide films from remote plasma chemical vapour deposition

Young-Bae Park, Jin-Kyu Kang, Shi-Woo Rhee
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Volume:
280
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(95)08191-7
File:
PDF, 2.30 MB
english, 1996
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