Structural, chemical, and electrical characterisation of...

Thin Solid Films 1996 Vol. 280; Iss. 1-2

Structural, chemical, and electrical characterisation of reactively sputtered WSx thin films

M. Regula, C. Ballif, J.H. Moser, F. Lévy
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Volume:
280
Year:
1996
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(95)08206-9
File:
PDF, 2.14 MB
english, 1996
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