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Preparation of silicon oxynitride (SiOxNy) thin films by pulsed laser deposition
Rong-Fu Xiao, Lun Chiu Ng, Chao Jiang, Z. Yang, George K.L. WongVolume:
260
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)09481-4
File:
PDF, 480 KB
english, 1995