Effects of substrate temperature on the structure and...

Thin Solid Films 1996 Vol. 280; Iss. 1-2

Effects of substrate temperature on the structure and properties of reactive pulsed laser deposited CNx films

C.W. Ong, X.-A. Zhao, Y.C. Tsang, C.L. Choy, P.W. Chan
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Volume:
280
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(96)00853-x
File:
PDF, 370 KB
english, 1996
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