P‐52: A Novel Six‐Mask Low‐Temperature...

SID Symposium Digest of Technical Papers 2020 / 08 Vol. 51; Iss. 1

P‐52: A Novel Six‐Mask Low‐Temperature Polycrystalline Silicon Architecture for TFT‐LCD Application

Luo, Chengzhi, He, Peng, Xu, Yong, Song, Dewei, Liu, Guanghui, COOPER,, Tang, Fuxiong, Ai, Fei
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Volume:
51
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.14183
Date:
August, 2020
File:
PDF, 1.77 MB
2020
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