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Eigenmode operation of piezoelectric resonant gyroscopes
Hodjat-Shamami, Mojtaba, Ayazi, FarrokhVolume:
6
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-020-00204-3
Date:
December, 2020
File:
PDF, 2.67 MB
2020