Multiscale simulation of the focused electron beam induced deposition process
de Vera, Pablo, Azzolini, Martina, Sushko, Gennady, Abril, Isabel, Garcia-Molina, Rafael, Dapor, Maurizio, Solovâyov, Ilia A., Solovâyov, Andrey V.Volume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-77120-z
Date:
December, 2020
File:
PDF, 2.62 MB
2020