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Silicon twisted cone structure produced by optical vortex pulse with structure evaluation by radiation hydrodynamic simulation
Nakamura, Daisuke, Tasaki, Ryohei, Kawamoto, Miki, Oshima, Hiroki, Higashihata, Mitsuhiro, Ikenoue, Hiroshi, Wakayama, Toshitaka, Sunahara, Atsushi, Higashiguchi, TakeshiVolume:
10
Journal:
Scientific Reports
DOI:
10.1038/s41598-020-77323-4
Date:
December, 2020
File:
PDF, 2.50 MB
2020