Impact of germanium doping on the mechanical strength of...

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Philosophical Magazine 2020 / 11

Impact of germanium doping on the mechanical strength of low oxygen concentration Czochralski silicon wafers

Wu, Junnan, Standley, Robert W., Flores, Katharine M.
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Journal:
Philosophical Magazine
DOI:
10.1080/14786435.2020.1845913
Date:
November, 2020
File:
PDF, 1.93 MB
2020
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