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[IEEE 2020 IEEE International Conference on Consumer Electronics - Asia (ICCE-Asia) - Seoul (2020.11.1-2020.11.3)] 2020 IEEE International Conference on Consumer Electronics - Asia (ICCE-Asia) - Feasibility Study of Predicting Semiconductor Thin Film Thickness Based on 1D Convolutional Neural Network
Park, Hyo-Bin, Lim, Kil-Taek, Kim, Kwang-JuYear:
2020
DOI:
10.1109/icce-asia49877.2020.9276883
File:
PDF, 473 KB
2020