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Growth and characterization of yttrium oxide thin layers on silicon deposited by yttrium evaporation in atomic oxygen
Jan Hudner, Håkan Ohlsén, Eva FredrikssonVolume:
46
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0042-207x(95)00084-4
File:
PDF, 556 KB
english, 1995