Controlled topography production—true 3D simulation and...

Vacuum 1995 Vol. 46; Iss. 8-10

Controlled topography production—true 3D simulation and experiment

LB Jonsson, C Hedlund, IV Katardjiev, AM Barklund, H-O Blom, S Berg
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Volume:
46
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(95)00085-2
File:
PDF, 1.06 MB
english, 1995
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