LPCVD silicon carbide and silicon carbonitride films using...

Vacuum 1995 Vol. 46; Iss. 8-10

LPCVD silicon carbide and silicon carbonitride films using liquid single precursors

L Kleps, F Caccavale, G Brusatin, A Angelescu, L Armelao
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Volume:
46
Year:
1995
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(95)00087-9
File:
PDF, 315 KB
english, 1995
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