Chemical vapour deposition of Cr, Mo and W thin films...

Vacuum 1995 Vol. 46; Iss. 8-10

Chemical vapour deposition of Cr, Mo and W thin films induced by synchrotron radiation

Derrick C Mancini, Per Skytt, Joseph Nordgren, Per Tägtström
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Volume:
46
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(95)00132-8
File:
PDF, 622 KB
english, 1995
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