The experience with JET's combined dc/RF glow discharge cleaning (GDC) system
R.J.H Pearce, P Andrew, S Bryan, R Claesen, J Harling, J How, H Jensen, H McBryan, J Orchard, G Saibene, A VadgamaVolume:
47
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0042-207x(96)00042-5
File:
PDF, 458 KB
english, 1996